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Palladium(II) hexafluoroacetylacetonate

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For Research Use Only | Not For Clinical Use
CATAP64916489
CAS64916-48-9
Structure
MDL NumberMFCD00015709
Molecular Weight520.52
EC Number265-271-1
InChI KeyOVIDFVVPPRGPGR-PAMPIZDHSA-L
Linear FormulaPd(C5HF6O2)2
Size1G, 5G
1

The Co-Reactant Role During Plasma Enhanced Atomic Layer Deposition of Palladium

Ji-Yu Feng, Matthias M Minjauw, Ranjith K Ramachandran, Michiel Van Daele, Hilde Poelman, Timo Sajavaara, Jolien Dendooven, Christophe Detavernier

Phys Chem Chem Phys. 2020 Apr 29;22(16):9124-9136.

PMID: 32301468

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