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Direct Inkjet Printing of Silver Source/Drain Electrodes on an Amorphous InGaZnO Layer for Thin-Film Transistors

Honglong Ning, Jianqiu Chen, Zhiqiang Fang, Ruiqiang Tao, Wei Cai, Rihui Yao, Shiben Hu, Zhennan Zhu, Yicong Zhou, Caigui Yang, Junbiao Peng

Materials (Basel). 2017 Jan 10;10(1):51.

PMID: 28772410

Abstract:

Printing technologies for thin-film transistors (TFTs) have recently attracted much interest owing to their eco-friendliness, direct patterning, low cost, and roll-to-roll manufacturing processes. Lower production costs could result if electrodes fabricated by vacuum processes could be replaced by inkjet printing. However, poor interfacial contacts and/or serious diffusion between the active layer and the silver electrodes are still problematic for achieving amorphous indium-gallium-zinc-oxide (a-IGZO) TFTs with good electrical performance. In this paper, silver (Ag) source/drain electrodes were directly inkjet-printed on an amorphous a-IGZO layer to fabricate TFTs that exhibited a mobility of 0.29 cm²·V-1·s-1 and an on/off current ratio of over 10⁵. To the best of our knowledge, this is a major improvement for bottom-gate top-contact a-IGZO TFTs with directly printed silver electrodes on a substrate with no pretreatment. This study presents a promising alternative method of fabricating electrodes of a-IGZO TFTs with desirable device performance.

Chemicals Related in the Paper:

Catalog Number Product Name Structure CAS Number Price
LS71443 Zinc oxide ink for inkjet printing Zinc oxide ink for inkjet printing Price
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