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Encapsulating Bis(beta-Ketoiminato) Polyethers. Volatile, Fluorine-Free Barium Precursors for Metal-Organic Chemical Vapor Deposition

Encapsulating Bis(beta-Ketoiminato) Polyethers. Volatile, Fluorine-Free Barium Precursors for Metal-Organic Chemical Vapor Deposition

D B Studebaker, D A Neumayer, B J Hinds, C L Stern, T J Marks

Inorg Chem. 2000 Jul 24;39(15):3148-57.

PMID: 11196849

Abstract:

The synthesis, characterization, and incorporation in volatile metal-organic chemical vapor deposition (MOCVD) precursors of a new class of linked beta-ketoiminate-polyether-beta-ketoiminate ligands is presented. These ligands are designed to encapsulate alkaline-earth cations having low charges and large ionic radii. Barium complexes having the general formula Ba[(RCOCHC(R')N)2(R")] (R = tert-butyl or CF3; R' = tert-butyl, methyl, or CF3; R" = -(CH2CH2O)4CH2CH2- or -(CH2CH2O)5CH2CH2)-) were prepared and characterized by 1H and 13C NMR spectroscopy, elemental analysis, and mass spectrometry. Single-crystal X-ray diffraction analysis of 2,2,5,25,28,28-hexamethyl-9,12,15,18,21-pentaoxa-4,25-diene-6,24- diimino-3,27-pentacosadionatobarium(II) reveals a monomeric, nine-coordinate, tricapped trigonal prismatic coordination geometry. Single-crystal X-ray structural analysis of 1,1,1,24,24,24-hexafluoro-4,21-ditrifluoromethyl-8,11,14,17- tetraoxa-3,21-diene-5,20-diimino-2,23-tetracosadionatobarium(II).2DMSO reveals a monomeric, ten-coordinate, distorted tetracapped trigonal prismatic coordination geometry. Volatility data are presented for these barium complexes, demonstrating viability as MOCVD precursors. In addition, it is demonstrated that thin epitaxial films of BaTiO3 can be grown on (001) MgO by low-pressure MOCVD techniques using one of these barium complexes and Ti(dipivaloylmethanate)2(isopropoxide)2 as precursors.

Chemicals Related in the Paper:

Catalog Number	Product Name	Structure	CAS Number	Price
AP24363379	Barium isopropoxide		24363-37-9	Price

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