Home
Resources
Publications
Fluorinated Low-Viscosity Copolymer With Enhanced Release Property for Roll-To-Plate UV Nanoimprint Lithography

Fluorinated Low-Viscosity Copolymer With Enhanced Release Property for Roll-To-Plate UV Nanoimprint Lithography

Su-Bong Lee, Seungmuk Ji, Jun-Young Lee, Jihye Lee, Jong-Souk Yeo

Nanotechnology. 2019 Dec 13;30(50):505301.

PMID: 31480035

Abstract:

A new fluorinated low-viscosity copolymer resin with enhanced release properties has been developed to provide higher fidelity for roll-based ultraviolet (UV) nanoimprint lithography (NIL) and simplify the process. The properties are optimized by blending (2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,9-heptadecafluorononyl) oxirane (EP-F8) and 1,4-butanediol divinyl ether (BDDVE) with 3,4-epoxycyclohexylmethyl-3,4-epoxy cyclohexane carboxylate. The cured resin renders the hydrophobicity and allows demolding from the stamp mold without an anti-stick layer (ASL), as further verified by the contact angle and the work of adhesion measurements. Due to the addition of BDDVE, our resin also has much lower viscosity compared to commercially available low-viscosity resins. These properties enable the transfer of high-density dot patterns by roll-to-plate (R2P) UV NIL in the newly developed resin without adding solvent or coating it with an ASL. These results demonstrate that our resin is a good option for high-quality, low-cost R2P UV NIL, as its use eliminates several steps in the imprinting process, making it applicable to the scalable fabrication of flexible devices.

Chemicals Related in the Paper:

Catalog Number	Product Name	Structure	CAS Number	Price
AP38565536	(2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,9-Heptadecafluorononyl)oxirane		38565-53-6	Price

As a specialist in analytical chemical Products, Alfa Chemistry offers consumers a wealth of raw materials and a full range of technologies and services.

QUICK LINKS

HEADQUARTERS

Tel:

Fax:

Email: